What Is a Scanning Probe Microscope?

Scanning Probe Microscope (SPM) is a scanning tunnel microscope and various new probe microscopes (atomic force microscope, electrostatic force microscope, magnetic force microscope, scanning ion conductivity microscope, and scanning electron microscope) developed on the basis of scanning tunnel microscope Chemical microscope, etc.) is a surface analysis instrument developed internationally in recent years. It is a comprehensive application of optoelectronic technology, laser technology, weak signal detection technology, precision mechanical design and processing, automatic control technology, digital signal processing technology, and applied optical technology. , Computer high-speed acquisition and control and high-resolution graphics processing technology and other modern scientific and technological achievements of optical, mechanical and electrical integrated high-tech products.


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